电源维修
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◆零组件技术支持
→电源维修
→RPS维修
→Pump维修保养
→马达维修
→阀维修
→机械手臂维修
→工控主机维修
→控制器&驱动器维修
→冷冻机维修
→库存供应
→heater维修
→ESC维修
◆核心零组件国产化研发、制造、销售
→电控国产化研发、制造、销售
→金属国产化研发、制造、销售
→工程材料国产化研发、制造、销售
→三通气动阀研发、制造、销售
◆设备翻新
→薄膜
→Dry Etch
→WET/FUR/SEM
◆国产化设备研发、制造、销售
MKS ASTRONi AX7670
MKS Astron AX7650
Advanced Energy 3155132-008
Mattson RFS3019 233771-01
Tokyo Electron TEL DAIHEN wmn-50h6
MUEGGE MX4000 Microwave
AD-TEC TR-3000-EI1-MT RF Generator
AD-TEC AX 3000III RF Generator
AD-TEC AX-1000(1000-20000 RF Generator
COMDEL CLF 5000 RF Generator
COMDEL CLX-2500 RF Generator
COMDEL CLX-10K RF Generator
COMDEL CX-1250S RF Generator
COMDEL CX-600S RF Generator
COMDEL CDX 2000 FP5302R1 13.56/2 MHz DUAL RF GENERATOR
COMDEL CDX 1000 13.56/2 MHz DUAL RF GENERATOR
MKS(ENI) SPECTRUM 11002 RF Generator 射频电源销售维修
MKS(ENI) SPECTRUM10513 RF Generator
MKS(ENI) OPTIMA RF Generator
MKS(ENI) NOVA RF Generator
MKS(ENI) ACG-10B RF Generator
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